Eco-design of manufacturing processes in the microelectronic industry
The microelectronic industry has been engaged for a long time in measures to reduce its impacts on the environment, regarding all the life cycle phases of its products. For the manufacturing sites, the logical follow-ups to the implementation of pollutions treatment systems are their anticipation. The eco-design of microelectronic technologies, that is the integration of environmental parameters in their development process, enables to meet this objective. The aim of our research work is to environmentally characterize the microelectronic manufacturing processes to propose tools and methods for their designers. Therefore, we modeled a microelectronic technology, and we matched environmental impacts with its inputs and outputs. This allows us to suggest environmental indicators for the R&D, which are adapted to a microelectronic development and manufacturing site.
PhD student: Ingwild BAUDRY Grenoble University, 2010 Director: Daniel BRISSAUD Parteners : Région Rhône-Alpes, STMicroelectronics Crolles
The objective is to design tools and methodologies for the R&D to quantify the environmental impacts generated by microelectronic processes, from the first stages of the technology development, in order to control them. The final goal is to anticipate the environmental impacts of the future technologies by eco-designing them.
Study of a recent microelectronic technology
Proposition of suitable environmental indicators
Proposition of an eco-design tool
Test of the tool on the latest technology
Environmental analysis of a recent technology
Study of two data collection methods (top-down, bottom-up)
Chemicals consumptions during the steps of the processes
Study of the other inputs / outputs flows
Development of a tool with suitable environmental indicators
Quantity of process gas consumed in a workshop during the production of one wafer, quantity of process gas consumed for a full wafer...
=> Compare the technologies => Anticipate the future environmental impacts